Tris(dimethylamino)cyclopentadienyl Hafnium, 99%, 5N (metals basis)

General Information

Formula
C₁₁H₂₃N₃Hf
Product Number
T200046
CAS Number
941596-80-1

Description

Tris(dimethylamino)cyclopentadienyl Hafnium, 99%, 5N (metals basis)

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Detailed Specification

Purity
99%
Product Family
Tris(dimethylamino)cyclopentadienyl Hafnium
MW (g/mol)
375.81
EC Number
826-032-2
Color
Colorless
Form
Colorless liquid

Application

A hafnium source precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes, used to prepare hafnium dioxide thin films and hafnium nitride thin films

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hafnium, Hydrogen, Nitrogen

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Tris(dimethylamino)cyclopentadienyl Hafnium, 99%, 5N (metals basis)

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