Tris(diethylamido)(tertbutylimido)tantalum(V), 6N (metals basis)

General Information

Formula
C₁₆H₃₉N₄Ta
Product Number
T200032
CAS Number
169896-41-7

Description

Tris(diethylamido)(tertbutylimido)tantalum(V), 6N (metals basis)

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Detailed Specification

Product Family
Tris(diethylamido)(tertbutylimido)tantalum(V)
MW (g/mol)
468.46
EC Number
624-910-8
MDL Number
MFCD02684506
UNSPSC Code
12352103
PubChem Substance ID
24874200
Color
Colorless transparent to light yellow
Form
Colorless transparent to light yellow liquid
NACRES
NA.23

Application

A tantalum source precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes, used to prepare tantalum nitride (TaN) and tantalum oxide (Ta2O5) thin films

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hydrogen, Nitrogen, Tantalum

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Tris(diethylamido)(tertbutylimido)tantalum(V), 6N (metals basis)

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