Trimethylaluminum, 6N (metals basis)

General Information

Formula
Al(CH3)3
Product Number
T200067
CAS Number
75-24-1

Trimethylaluminum, 6N (metals basis)

Detailed Specification

Product Family
Trimethylaluminum
MW (g/mol)
72.09
Color
Colorless
Form
Transparent liquid

Application

Key precursor for ALD/CVD/MOCVD; preparation of high-purity aluminum-containing thin films, aluminum oxide, aluminum nitride and other thin films; catalyst and auxiliary agent in organic synthesis and polymer synthesis reactions
Organic Chemicals, Organometallic Compounds


Chemical Manufacturing, Electrical & Semiconductor


Aluminum, Carbon, Hydrogen


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Trimethylaluminum, 6N (metals basis)

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