Tetrakis(dimethylamido)zirconium(IV), 99%, 5N (metals basis)

General Information

Formula
C₈H₂₄N₄Zr
Product Number
T200049
CAS Number
19756-04-8

Description

Tetrakis(dimethylamido)zirconium(IV), 99%, 5N (metals basis)

Price: Price range: $870.24 through $13,201.84
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Detailed Specification

Purity
99%
Product Family
Tetrakis(dimethylamido)zirconium(IV)
MW (g/mol)
267.53
EC Number
629-068-5
MDL Number
MFCD00239502
UNSPSC Code
12352103
PubChem Substance ID
24880977
Color
Light yellow to yellow
Form
Light yellow to yellow liquid
NACRES
NA.23

Application

A zirconium source precursor for preparing zirconium based thin films using atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hydrogen, Nitrogen, Zirconium

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Tetrakis(dimethylamido)zirconium(IV), 99%, 5N (metals basis)

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