Tert-butylphosphane, 99.5%, 6N (metals basis)

General Information

Formula
C₄H₁₁P
Product Number
T200004
CAS Number
2501-94-2

Tert-butylphosphane, 99.5%, 6N (metals basis)

Detailed Specification

Purity
99.5%
Product Family
Tert-butylphosphane
MW (g/mol)
90.10
EC Number
607-486-9
MDL Number
MFCD00761891
Color
Colorless
Form
Colorless liquid

Application

A phosphine source precursor for MOCVD process, involved in the deposition process of semiconductor materials such as gallium nitride (GaN) and indium phosphide (InP).
Inorganic Chemicals and Salts


Electrical & Semiconductor


Carbon, Hydrogen, Phosphorus


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Tert-butylphosphane, 99.5%, 6N (metals basis)

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