Pentakis(dimethylamido)tantalum(V), 6N (metals basis)

General Information

Formula
C₁₀H₃₀N₅Ta
Product Number
P200037
CAS Number
19824-59-0

Description

Pentakis(dimethylamido)tantalum(V), 6N (metals basis)

Price: $2,171.79
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Detailed Specification

Product Family
Pentakis(dimethylamido)tantalum(V)
MW (g/mol)
401.33
EC Number
624-567-4
MDL Number
MFCD01631286
UNSPSC Code
12352103
PubChem Substance ID
24873088
Color
Orange
Form
Orange solid
NACRES
NA.23

Application

A tantalum source precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes, used to prepare tantalum nitride (TaN) and tantalum oxide (Ta2O5) thin films

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hydrogen, Nitrogen, Tantalum

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Pentakis(dimethylamido)tantalum(V), 6N (metals basis)

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