N,N’-Bis(1,1-dimethylethyl)-silanediamine, 99.5%, 6N (metals basis)

General Information

Formula
C₈H₂₂N₂Si
Product Number
N200030
CAS Number
186598-40-3

Description

N,N’-Bis(1,1-dimethylethyl)-silanediamine, 99.5%, 6N (metals basis)

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Detailed Specification

Purity
99.5%
Product Family
N,N’-Bis(1,1-dimethylethyl)-silanediamine
MW (g/mol)
174.36
MDL Number
MFCD03411245
Color
Colorless
Form
Colorless liquid

Application

A precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes used to prepare silicon-based thin films

Chemical Classification

Organic Chemicals

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hydrogen, Nitrogen, Silicon

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N,N’-Bis(1,1-dimethylethyl)-silanediamine, 99.5%, 6N (metals basis)

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