Hafnium(IV) chloride, 99%, 6N (metals basis)

General Information

Formula
HfCl₄
Product Number
H200044
CAS Number
13499-05-3

Description

Hafnium(IV) chloride, 99%, 6N (metals basis)

Price: Price range: $2,734.21 through $4,249.23
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Detailed Specification

Purity
99%
Product Family
Hafnium(IV) chloride
MW (g/mol)
320.3
EC Number
236-826-5
MDL Number
MFCD00011034
UNSPSC Code
12352302
PubChem Substance ID
24855637
Color
White
Form
White solid
NACRES
NA.23

Application

High k thin film deposition precursor used in ALD/CVD processes for high-end integrated circuit manufacturing; Key raw materials for synthesizing hafnium containing thin film precursors

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Chemical Manufacturing, Electrical & Semiconductor

Base Metal

Chlorine, Hafnium

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Hafnium(IV) chloride, 99%, 6N (metals basis)

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