Diisopropylaminosilane, 99.5%, 6N (metals basis)

General Information

Formula
C₆H₁₇NSi
Product Number
D200027
CAS Number
908831-34-5

Description

Diisopropylaminosilane, 99.5%, 6N (metals basis)

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Detailed Specification

Purity
99.5%
Product Family
Diisopropylaminosilane
MW (g/mol)
131.29
EC Number
640-373-2
MDL Number
MFCD32201247
Color
Colorless
Form
Colorless liquid

Application

A precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes used to prepare silicon-based thin films

Chemical Classification

Organic Chemicals

Industry

Chemical Manufacturing

Base Metal

Carbon, Hydrogen, Nitrogen, Silicon

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Diisopropylaminosilane, 99.5%, 6N (metals basis)

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