Bis(diethylamino)silane, 99.5%, 6N (metals basis)

General Information

Formula
C₈H₂₂N₂Si
Product Number
B200029
CAS Number
27804-64-4

Description

Bis(diethylamino)silane, 99.5%, 6N (metals basis)

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Detailed Specification

Purity
99.5%
Product Family
Bis(diethylamino)silane
MW (g/mol)
174.36
EC Number
631-070-6
MDL Number
MFCD19105220
Color
Colorless
Form
Colorless liquid

Application

A precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes used to prepare silicon-based thin films

Chemical Classification

Organic Chemicals

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hydrogen, Nitrogen, Silicon

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Bis(diethylamino)silane, 99.5%, 6N (metals basis)

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