Tris(methylcyclopentadienyl)Yttrium, 99%, 4N (metals basis)

General Information

Formula
C₁₈H₂₁Y
Product Number
T200055
CAS Number
329735-72-0

Description

Tris(methylcyclopentadienyl)Yttrium, 99%, 4N (metals basis)

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Detailed Specification

Purity
99%
Product Family
Tris(methylcyclopentadienyl)Yttrium
MW (g/mol)
326.27
EC Number
630-916-1
MDL Number
MFCD00145485
Color
Yellow
Form
Yellow solid

Application

A yttrium source precursor for the preparation of yttrium oxide thin films using atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hydrogen, Yttrium

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Tris(methylcyclopentadienyl)Yttrium, 99%, 4N (metals basis)

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