Tetrakis(ethylmethylamido)zirconium(IV), 99%, 6N (metals basis)

General Information

Formula
C₁₂H₃₂N₄Zr
Product Number
T200052
CAS Number
175923-04-3

Description

Tetrakis(ethylmethylamido)zirconium(IV), 99%, 6N (metals basis)

Price: Price range: $2,311.67 through $8,942.47
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Detailed Specification

Purity
99%
Product Family
Tetrakis(ethylmethylamido)zirconium(IV)
MW (g/mol)
323.64
EC Number
623-196-5
MDL Number
MFCD03427131
UNSPSC Code
12352103
PubChem Substance ID
24879307
Color
Colorless transparent to light yellow
Form
Colorless transparent to light yellow liquid
NACRES
NA.23

Application

A zirconium source precursor for preparing zirconium based thin films using atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hydrogen, Nitrogen, Zirconium

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Tetrakis(ethylmethylamido)zirconium(IV), 99%, 6N (metals basis)

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