Tetrakis(ethylmethylamido)hafnium(IV), 99%, 6N (metals basis)

General Information

Formula
C₁₂H₃₂N₄Hf
Product Number
T200048
CAS Number
352535-01-4

Description

Tetrakis(ethylmethylamido)hafnium(IV), 99%, 6N (metals basis)

Price: Price range: $2,364.29 through $4,816.22
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Detailed Specification

Purity
99%
Product Family
Tetrakis(ethylmethylamido)hafnium(IV)
MW (g/mol)
410.90
EC Number
629-684-4
MDL Number
MFCD03427130
Beilstein/REAXYS Number
55485595
UNSPSC Code
12352103
PubChem Substance ID
24879306
Color
Colorless
Form
Colorless liquid
NACRES
NA.23

Application

A hafnium source precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes, used to prepare hafnium dioxide thin films and hafnium nitride thin films

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hafnium, Hydrogen, Nitrogen

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Tetrakis(ethylmethylamido)hafnium(IV), 99%, 6N (metals basis)

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