Tetrakis(dimethylamino)hafnium(IV), 99%, 6N (metals basis)

General Information

Formula
C₈H₂₄N₄Hf
Product Number
T200047
CAS Number
19782-68-4

Description

Tetrakis(dimethylamino)hafnium(IV), 99%, 6N (metals basis)

Price: $10,909.15
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Detailed Specification

Purity
99%
Product Family
Tetrakis(dimethylamino)hafnium(IV)
MW (g/mol)
354.79
EC Number
629-069-0
MDL Number
MFCD01862473
UNSPSC Code
12352103
PubChem Substance ID
24869038
Color
White
Form
White solid
NACRES
NA.23

Application

A hafnium source precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes, used to prepare hafnium dioxide thin films and hafnium nitride thin films

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hafnium, Hydrogen, Nitrogen

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Tetrakis(dimethylamino)hafnium(IV), 99%, 6N (metals basis)

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