Cyclopentadienylzirconium trisdimethylamide、Tris(dimethylamino)cyclopentadienylzirconium, 99.5%, 6N (metals basis)

General Information

Formula
C₁₁H₂₃N₃Zr
Product Number
C200045
CAS Number
33271-88-4

Description

Cyclopentadienylzirconium trisdimethylamide、Tris(dimethylamino)cyclopentadienylzirconium, 99.5%, 6N (metals basis)

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Detailed Specification

Purity
99.5%
Product Family
Cyclopentadienylzirconium trisdimethylamide、Tris(dimethylamino)cyclopentadienylzirconium
MW (g/mol)
288.55
EC Number
680-407-3
Color
Colorless transparent to light yellow
Form
Colorless transparent to light yellow liquid

Application

A zirconium source precursor for preparing zirconium based thin films using atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Chemical Manufacturing

Base Metal

Carbon, Hydrogen, Nitrogen, Zirconium

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Cyclopentadienylzirconium trisdimethylamide、Tris(dimethylamino)cyclopentadienylzirconium, 99.5%, 6N (metals basis)

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