Tris(dimethylamido)gallium(III), 99%, 6N (metals basis)

General Information

Formula
C₁₂H₃₆Ga₂N₆
Product Number
T200031
CAS Number
57731-40-5

Description

Tris(dimethylamido)gallium(III), 99%, 6N (metals basis)

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Detailed Specification

Purity
99%
Product Family
Tris(dimethylamido)gallium(III)
MW (g/mol)
403.90
EC Number
200-287-4
MDL Number
MFCD11973803
Color
White
Form
White solid

Application

A gallium source precursor for the preparation of gallium nitride (GaN) thin films using chemical vapor deposition (CVD) or atomic layer deposition (ALD) processes

Chemical Classification

Organic Chemicals

Industry

Electrical & Semiconductor

Base Metal

Carbon, Gallium, Hydrogen, Nitrogen

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Tris(dimethylamido)gallium(III), 99%, 6N (metals basis)

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