Tris(dimethylamino)silane, 99.5%, 6N (metals basis)

General Information

Formula
C₆H₁₉N₃Si
Product Number
T200028
CAS Number
15112-89-7

Description

Tris(dimethylamino)silane, 99.5%, 6N (metals basis)

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Detailed Specification

Purity
99.5%
Product Family
Tris(dimethylamino)silane
MW (g/mol)
161.32
EC Number
239-165-0
MDL Number
MFCD00048006
Color
Colorless
Form
Colorless liquid

Application

A precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes used to prepare silicon-based thin films

Chemical Classification

Organic Chemicals

Industry

Electrical & Semiconductor

Base Metal

Carbon, Hydrogen, Nitrogen, Silicon

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Tris(dimethylamino)silane, 99.5%, 6N (metals basis)

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